Influence of nucleation density on film quality,growth rate and morphology of thick CVD diamond films |
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| Affiliation: | 1. Institute of Physics, Academy of Sciences of the Czech Republic, v.v.i., Prague 8, Czech Republic;2. Institute of Applied Physics and Mathematics, University of Pardubice, Studentska 95, 53210 Pardubice, Czech Republic;3. Nuclear Physics Institute, Academy of Sciences of the Czech Republic, v.v.i., Rež near Prague, Czech Republic;1. Institute of Physics, CAS, Cukrovarnická 10, 16200 Prague, Czech Republic;2. Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 27, 16627 Prague, Czech Republic;1. Harbin Institute of Technology, 92 Xidazhi Str., 150001 Harbin, PR China;2. General Physics Institute of Russian Academy of Sciences, Vavilov Str. 38, 119991 Moscow, Russia;3. National Research Nuclear University “MEPhI”, Kashirskoe Shosse 31, 115409 Moscow, Russia;4. Institute of Radio Engineering and Electronics RAS, 141190 Fryazino, Russia;5. National Research University of Electronic Technology, Zelenograd, 124498 Moscow, Russia;1. Institute of Applied Physics, RAS, Nizhny Novgorod, Russia;2. Institute for Physics of Microstructures, RAS, Nizhny Novgorod, Russia |
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| Abstract: | The optimum growth parameters of our 5 kW microwave plasma CVD reactor were obtained using CH4/H2/O2 plasma and high quality transparent films can be produced reproducibly. Among the films prepared in this system, the film of best quality has very smooth crystalline facets free of second nucleation and the full width at half maximum (FWHM) of the diamond Raman peak is 2.2 cm−1, as narrow as that of IIa natural diamond. For this study, diamond films were grown on silicon substrates with low (104–105 cm−2) and high nucleation densities (>1010 cm−2), respectively. From the same growth run, a highly 〈110〉 textured 300 μm thick white diamond film with a growth rate of 2.4 μm/h was obtained from high nucleation densities (>1010 cm−2), and a white diamond film of 370 μm in thickness with a higher growth rate of 3 μm/h was obtained from low nucleation densities (5×104–105 cm−2) too. The effect of nucleation density on film quality, growth rate, texture and morphology was studied and the mechanism was discussed. Our results suggest that under suitable growth conditions, nucleation density has little effect on film quality and low nucleation density results in higher growth rate than high nucleation density due to less intense grain growth competition. |
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