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| 喷墨打印头陶瓷喷孔的皮秒激光加工研究 | |
| 引用本文： | 褚祥诚,仲作金,张红军,张淑兰,周梅,崔宏超,文军,钟敏霖.喷墨打印头陶瓷喷孔的皮秒激光加工研究[J].佛山陶瓷,2014,24(12):24-26. |
| 作者姓名： | 褚祥诚 仲作金 张红军 张淑兰 周梅 崔宏超 文军 钟敏霖 |
| 作者单位： | 1. 清华大学材料学院新型陶瓷与精细工艺国家重点实验室,北京,100084 2. 清华大学材料学院激光材料加工研究中心先进成形制造教育部重点实验室,北京,100084 3. 北京派和科技股份有限公司,北京,100083 4. 佛山市陶瓷研究所有限公司,佛山,528031 |
| 基金项目： | 该项目得到了佛山市科技创新专项资金“佛山市重大科技项目海内外招标”，佛山市产学研专项资金，北京市科委科技计划(资助号Z141100003814004)大力支持;特此感谢 |
| 摘 要： | 喷墨打印头的喷孔直径一般为几十微米,材料一般是有机薄膜、不锈钢薄片等。针对有机膜等作为喷嘴板材料的缺陷,采用氧化锆陶瓷代替,以提高耐磨能力和耐腐蚀性。采用皮秒激光打孔方法,可在多种材料上加工出直径几十微米的小孔,包括聚酰亚胺（厚度50μm）、氧化锆陶瓷（厚度120μm）和铜片（厚度70μm）。通过控制不同的参数变化,可制备出孔径约20μm、孔间距为140μm的喷孔阵列。对比不同参数下喷孔尺寸和微观形貌发现,较高功率密度、较低单点停留时间有助于得到圆孔,减少重铸层。 |
| 关 键 词： | 喷墨孔 氧化锆陶瓷 聚酰亚胺 铜片 皮秒激光打孔 |
Research on Picosecond Laser Drilling of Inkjet Printhead Nozzle |
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| Affiliation: | CHU Xiang-cheng,ZHONG Zuo-jin,ZHANG Hong-jun,ZHANG Shu-lan,ZHOU Mei,CUI Hong-chao,WEN Jun,ZHONG Min-lin (1.State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China; 2.Key Laboratory for Advanced Materials Processing, Ministry of Education, Laser Materials Processing Research Centre, School of Materials Science and Engineering, Tsinghua University, Beijing 100054, China; 3.Paihe Science ＆ Technology Holding Co., Led Beijing, 100083; 4. Foshan Ceramics Research Institute CO., LTD, Foshan 528031) |
| Abstract: | The nozzle diameter of the inkjet printhead is typically several tens of microns, and the material is generally organic thin film,stainless steel sheet or the like. For the disadvantage of organic thin film as nozzle plate material, zirconium oxide ceramics is used instead to improve wearability and corrosion resistance. Picosecond laser drilling method can be applied to fabricate orifices with a diameter of several tens of microns in a variety of materials including polyimide（50μm）, zirconia ceramics（120μm） and thin copper sheet（70μm）. By controlling various parameters, an array of nozzles with pore size of 20μm and interval of 140μm can be prepared. Comparison of different parameters nozzle size and micro-morphology indicates that higher power and lower single point residence time help to get a round hole, and to reduce recast layer. |
| Keywords: | inkjet nozzle zirconia ceramics polyimide thin copper sheet picosecond laser drilling |
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