基于相位调整的三维超声微操纵技术

为了将超声辐射力应用到微机电系统领域，以达到对微构件进行无损、非接触遥操纵的目的，开展了三维超声辐射力场合成的理论与实验研究，提出了基于相位调整的三维超声微操纵技术.在研究单个圆形平面活塞换能器声场分布以及声场和辐射力关系的基础上，将以相同频率驱动的4个平面活塞换能器呈正四面体放置，利用声波合成原理获得三维超声驻波场，通过调整各个换能器发射信号相位之间的关系实现对微构件在空间范围内的俘获、移动、释放等操纵.实验结果表明，该技术能够有效地实现对微构件的三维操纵，具有响应速度快、定位精度高、易于控制、操纵范围广等优点

Three-dimensional ultrasonic micro-manipulation technique based on phase adjustment

In order to apply ultrasonic radiation force in the field of micro-electro-mechanical systems(MEMS) to realize non-destructive and non-contact manipulation on micro-components,theoretical and experimental research on the three-dimensional synthetic field of ultrasonic radiation force were conducted,then a novel three-dimensional ultrasonic micro-manipulation technique based on phase adjustment was proposed.On the basis of investigating the sound field of a plane piston transducer and the relations between sound field and radiation force,by settling four plane piston transducers driven at the same frequency at each corner of a regular triangular pyramid with their sound-beam axes crossing at the center of the pyramid,this technique uses ultrasonic wave synthetic theory to acquire a three-dimensional ultrasonic standing wave field.The micro-component can be captured,transported,released in the range of space by adjusting the phase of the transducers.Experimental results indicated that the presented technique can manipulate the micro-component efficiently,and has advantages of fast response,high precision,convenient control and wide manipulation.