| LSI单元图形的最小划分 |
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| 引用本文： | 王绍钧.LSI单元图形的最小划分[J].山东大学学报(工学版),1987(4). |
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| 作者姓名： | 王绍钧 |
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| 作者单位： | 山东工业大学电机工程系 |
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| 摘 要： | 讨论划分一类平面区域为一组矩形域的方法。推导出最小划分数公式;给出最小划分算法。由此可分割LSI单元图形成最少曝光单元,以提高曝光效率和版图光刻质量。
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| 关 键 词： | 大规模集成电路 组合数学 算法分析 |
The Minimum Partition of LSI Graph Element |
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| Wang Shaojun.The Minimum Partition of LSI Graph Element[J].Journal of Shandong University of Technology,1987(4). |
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| Authors: | Wang Shaojun |
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| Affiliation: | Dept. of Electr. Eng. |
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| Abstract: | An approach of partitioning a kind of plane field into a group of rectangular field is discussed. A formula for the minimum partition is derived and algorithm for the minimum partition is given. By e formula and the algorithm, we can partition a graph of LSI element into a group of minimum exposure element, to advance exposure efficiency and lithophotography quality. |
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| Keywords: | Large scale integrated circuit (LSI) Combinatorial mathematics Algorithms analysis |
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