| Ta2O5材料光学常数的拟合及其在近紫外到近红外波段应用 |
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| 引用本文： | 庄秋慧,穆岩,段微波.Ta2O5材料光学常数的拟合及其在近紫外到近红外波段应用[J].长春理工大学学报,2008,31(4). |
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| 作者姓名： | 庄秋慧 穆岩 段微波 |
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| 作者单位： | 重庆工学院,电子信息与自动化学院,重庆,400050;空军驻石家庄地区军事代表,石家庄,050000;上海技术物理研究所,上海,200083 |
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| 基金项目： | 国家自然科学基金
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| 摘 要： | Ta2O5在近紫外到近红外波段作为高折射率材料有着广泛的应用,由于色散和吸收,Ta2O5在不同波段的光学常数不尽相同.此外,不同的制备条件下,Ta2O5材料的光学常数也会出现差异.如何精确得出Ta2O5材料在确定工艺条件下的光学常数成了薄膜工作者关心的话题.本文介绍了一种采用电子枪蒸发并加以离子束辅助技术制备Ta2O5薄膜的方法,对薄膜从近紫外到近红外的光学常数进行了拟合,并举例说明了Ta2O5材料在近紫外波段的应用.
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| 关 键 词： | 薄膜 色散 吸收 光学常数 |
Optical Constant Fitting and Applicationof Ta_2O_5 from Near Ultraviolet to Near Infrared |
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| ZHUANG Qiuhui ,MU Yan,DUAN Weibo.Optical Constant Fitting and Applicationof Ta_2O_5 from Near Ultraviolet to Near Infrared[J].Journal of Changchun University of Science and Technology,2008,31(4). |
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| Authors: | ZHUANG Qiuhui MU Yan DUAN Weibo |
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| Affiliation: | ZHUANG Qiuhui 1,MU Yan2,DUAN Weibo3(1.Chongqing institute of technology,Chongqing 400050,2.Air force representative office Shijiazhuang branch,Shijiazhuang 05000,3.Shanghai Institute of Technical Physics,Shanghai 200083) |
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| Abstract: | Ta2O5 is widely used from near ultraviolet to near infrared waveband as a kind of high refractive index film material.The optical constant of Ta2O5 is vary because of its dispersion and absorption as well as different technological conditions.It is a challenge to confirm the optical constant of Ta2O5 in certain technological condition.Ta2O5 film was fabricateel by E-beam gun evaporation and ion assisted system in this paper,and fitting of Ta2O5 optical constant,application of Ta2O5 material are introduced. |
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| Keywords: | film material dispersion absorption optical constant |
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