数字地震仪在精密装置支撑结构微振动分析中的应用

精密光学装置支撑结构的微振动响应分析是大型光学系统稳定运行的重要保证。为了分析精密镜架在微振动响应下的响应是否满足设计要求，采用流动式数字地震仪的背景噪声测试方法，对精密光学装置支撑结构的环境地面振动进行了测试和数据处理，并就如何应用测试数据进行支撑结构微振动响应分析进行了初步探讨；并以实测数据作为激励，采用ANSYS谱分析模块对镜架的响应进行了分析，结果表明镜架在微振动作用下的响应满足设计要求。

The Application of Digital Seismograph in the Microvibration Analysis of the Precision Optical Equipment

The microvibration response analysis of precision optical equipment support structure is the guarantee of the large optical system working steadily.To analyze whether the response can satisfy the design demand,this paper measure the ground ambient vibration of the precision optical device support structure by the way which is used to measure background sound by removal digital seismograph,analyze the data and discuss how to do support structure microvibration response analysis by the measure data.The spectrum analyse module of ANSYS is used to analyze the mirror mount's response.The results indicate that the mirror mount under the effect of micro vibration can satisfy design demand.