| 红外探测器PT薄膜的实验研究 |
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| 引用本文： | 孙晓松,孙晓楠.红外探测器PT薄膜的实验研究[J].土木与环境工程学报,1994,16(3). |
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| 作者姓名： | 孙晓松 孙晓楠 |
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| 作者单位： | 重庆建筑大学，重庆大学光机系 |
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| 摘 要： | 对用于红外探测器和光声电子器件的ＰＴ薄膜的制备工艺及热处理过程进行了实验研究，对多离子束反应共溅射法制备薄膜，作了相应的ｘ衍射、ＸＰＳ能谱及ＥＰＭＡ分析。通过实验，成功地除去了薄膜中ＰｂＯ和焦绿石杂质，并改善了ＰｂＴｉＯ３（００１）的择优取向程度，从而为制备衬底温度的优这提供了依据。
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| 关 键 词： | PbTiO3薄膜，红外线探测器，XPS能谱 |
TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR |
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| Sun Xiaosong,Sun Xiaonan.TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR[J].Journal of Civil and Environmental Engineering,1994,16(3). |
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| Authors: | Sun Xiaosong Sun Xiaonan |
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| Affiliation: | Sun Xiaosong;Sun Xiaonan(Chongqing University)(Chongqing Jianzhu University ) |
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| Abstract: | The preparation technology and thermal treatment PT thin film used in infrareddetector and photo-electron devices are studied. The er thin film prepared by multi-ion-beam reac-tive co-sputtering apparams are analysised by x-ray , XPS and EPMA. The impurity of PbO,Pb2Ti2O6 in PT thin film is eleminated and PbTiO3 (001)preferred orientation is improved. The rea-sonable teperature of substrates is given in this paper. |
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| Keywords: | PT thin fillm infrared detecor XPS |
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