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sol-gel法制备WO3薄膜的成膜性研究
引用本文:吉晓瑞,张冬,付义成,泰国驹.sol-gel法制备WO3薄膜的成膜性研究[J].沈阳工程学院学报(自然科学版),2012,8(3):275-277.
作者姓名:吉晓瑞  张冬  付义成  泰国驹
作者单位:沈阳工程学院基础教学部,沈阳,110136
摘    要:用sol-gel法在ITO导电玻璃上制备了WO3电致变色薄膜,用光学显微镜对所有薄膜进行拍照,对比薄膜的成膜情况.经观察发现,薄膜前驱液浓度、拉膜速度和杂质对成膜性均有显著影响.从拉膜的过程方面讨论了出现上述情况的原因.

关 键 词:sol-gel法  WO3薄膜  成膜性

Formation properties of WO3 thin film prepared by sol-gel
JI Xiao-rui , ZHANG Dong , FU Yi-cheng , QI Guo-ju.Formation properties of WO3 thin film prepared by sol-gel[J].Journal of Shenyang Institute of Engineering:natural Science,2012,8(3):275-277.
Authors:JI Xiao-rui  ZHANG Dong  FU Yi-cheng  QI Guo-ju
Affiliation:JI Xiao-rui,ZHANG Dong,FU Yi-cheng,QI Guo-ju(Department of Preparatory Course,Shenyang Institute of Engineering,Shenyang 110136,China)
Abstract:WO3 electrochromic thin film is prepared on ITO glass substrate by sol-gel method.By using optical microscope,we get all the optical pictures of films prepared.These pictures show that the concentration of precursor solution,the speed of dip coating and the impurity in solution affect the quality of film.In this paper,we will discuss the reasons of the situation above from the process of dip coating.
Keywords:sol-gel method  WO3 thin film  film forming ability
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