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化学镀非晶态Pd膜制备工艺的优化研究
引用本文:刘菲,王仲民,王殿辉.化学镀非晶态Pd膜制备工艺的优化研究[J].桂林电子科技大学学报,2009,29(5).
作者姓名:刘菲  王仲民  王殿辉
作者单位:桂林电子科技大学,材料科学与工程学院,广西,桂林,541004
基金项目:教育部留学归国人员科研启动基金,广西回国基金 
摘    要:采用化学镀方法施镀可获得致密吸附性好的单颗粒钯膜.通过对比不同试验条件,对化学镀钯膜的过程中所涉及到的工艺条件,包括施镀温度、施镀时间、pH值进行优化,结合SEM、XRD、EDS等分析手段对实验所得钯膜进行表征.实验表明,在温度为70 ℃,施镀时间2 h,NH4OH的浓度4.5 mol/L,pH值9.8的施镀条件下,得到膜厚约为0.6 μm非晶态合金镀层,具有良好的导电性、抗腐蚀性和硬度,结构致密不易破损脱落,并且其成分较纯,不含其它杂质.

关 键 词:化学镀  Pd膜  非晶态

The study of optimizing preparation processing of electroless deposited amorphous Pd coats
LIU Fei,WANG Zhong-min,WANG Dian-hui.The study of optimizing preparation processing of electroless deposited amorphous Pd coats[J].Journal of Guilin Institute of Electronic Technology,2009,29(5).
Authors:LIU Fei  WANG Zhong-min  WANG Dian-hui
Affiliation:LIU Fei,WANG Zhong-min,WANG Dian-hui (School of Materials Science and Engineering,Guilin University of Electronic Technology,Guilin 541004,China)
Abstract:Electroless deposited single spherical particles Pd coats have been prepared by electroless method.Improving the process conditions of depositing temperature,depositing time and pH value by comparing test conditions.The Pd coats were analyzed by SEM,XRD,and EDS analysis.The results showed that the Pd coats was amorphous prepared under temperature 70 degrees centigrade,2 hours deposited time,9.8 pH value,which had good electrical conductivity,corrosion resistance and hardness,and the thickness of the Pd coat...
Keywords:electroless deposited  Pd coats  amorphous  
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