| Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO2-CeO2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering |
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| 引用本文： | ZHAO Qingnan NI Jiamiao ZHANG Naizhi ZHAO Xiujian JIANG Hong WANG Guirong. Effects of Substrate Temperatures on the Structure and UV-shielding Properties of TiO2-CeO2 Films Deposited on Glass by Radio-frequency Magnetron Sputtering[J]. 武汉理工大学学报(材料科学英文版), 2005, 20(4): 7-9. DOI: 10.1007/BF02841269 |
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| 作者姓名： | ZHAO Qingnan NI Jiamiao ZHANG Naizhi ZHAO Xiujian JIANG Hong WANG Guirong |
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| 作者单位： | [1]Key Laboratory of Silicate Materials Science and Engineering（Wuhan University of Technology）,Ministry of Education,Wuhan 430070, China [2]China Luoyang Float Glass Group Co. Ltd., Luoyang 471009, China |
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| 基金项目： | Funded by the “863” Prnject of China（ No. 20002AA335030） |
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| 摘 要： | TiO2-CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar：O2=95：5 atmosphere.The structure,surface composition,UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy,respectively.The experimental results show that the films are amorphous,there are only Ti^4＋ and Ce^4＋ on the surface of the films,the obtained TiO2-CeO2 films shou a good uniformity and high densification,and the films deposited on the glass can shield ultraviolet light without significant absorpition of visible light,the films deposited on substrates at room temperature and 220℃ absorb UV effectively.
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| 关 键 词： | 射频磁控管溅射法 TiO2-CeO2薄膜 防辐射覆层玻璃 衬底温度 |
| 收稿时间： | 2005-02-24 |
| 修稿时间： | 2005-09-23 |
Effects of substrate temperatures on the structure and UV-shielding properties of TiO2−CeO2 films deposited on glass by radio-frequency magnetron sputtering |
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| Zhao Qingnan,Ni Jiamiao,Zhang Naizhi,Zhao Xiujian,Jiang Hong,Wang Guirong. Effects of substrate temperatures on the structure and UV-shielding properties of TiO2−CeO2 films deposited on glass by radio-frequency magnetron sputtering[J]. Journal of Wuhan University of Technology. Materials Science Edition, 2005, 20(4): 7-9. DOI: 10.1007/BF02841269 |
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| Authors: | Zhao Qingnan Ni Jiamiao Zhang Naizhi Zhao Xiujian Jiang Hong Wang Guirong |
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| Affiliation: | (1) Key Laboratory of Silicate Materials Science and Engineering (Wuhan University of Technology), Ministry of Education, 430070 Wuhan, China;(2) China Luoyang Float Glass Group Co. Ltd., 471009 Luoyang, China |
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| Abstract: | TiO2−CeO2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO2-60% molar CeO2 ceramic target in Ar: O2=95∶5 atmosphere. The structure, surface composition, UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction, and X-ray photoelectron spectroscopy, respectively. The experimental results show that the films are amorphous, there are only Ti4+ and Ce4+ on the surface of the films, the obtained TiO2−CeO2 films show a good uniformity and high densification, and the films deposited on the glass can shield ultraviolet light without significant absorption of visible light, the films deposited on substrates at room temperature and 220 °C absorb UV effectively. Funded by the “863” Project of China (No. 2002AA335030) |
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| Keywords: | rf sputtering TiO2-CeO2 films ultraviolet-shielding coating glass substrate temperatures |
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