| 高速精密定位平台的偏摆误差实时补偿 |
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| 引用本文： | 晏祖根,孙立宁.高速精密定位平台的偏摆误差实时补偿[J].哈尔滨工业大学学报,2009(12):290-294. |
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| 作者姓名： | 晏祖根 孙立宁 |
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| 作者单位： | 哈尔滨商业大学轻工学院;哈尔滨工业大学机器人研究所 |
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| 摘 要： | 针对二维直线运动平台末端出现偏摆误差、降低平台直线运动精度的现象,研制了一种新型的基于偏摆误差实时补偿的高速精密定位平台.基于电容式微位移传感检测技术,建立了新型精密定位平台的偏摆误差检测模型.采用赫兹接触理论,建立了滚珠导轨副的刚度模型,进而建立了基于滚珠丝杠驱动、直线滚珠导轨副支撑的宏动工作台的偏摆振动模型.实验结果验证了宏动工作台偏摆振动模型的有效性;采用微动工作台进行宏动工作台直线运动偏摆误差的实时补偿,新型精密定位平台的性能得到较大改善.
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| 关 键 词： | 精密定位 误差补偿 直线滚珠导轨 振动 |
A novel precision positioning table based on real-time yaw error compensation |
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| YAN Zu-gen,SUN Li-ning.A novel precision positioning table based on real-time yaw error compensation[J].Journal of Harbin Institute of Technology,2009(12):290-294. |
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| Authors: | YAN Zu-gen SUN Li-ning |
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| Affiliation: | 1.Light Industry College,Harbin University of Commerce,Harbin,150028,China;2.Robotics Institute,Harbin Institute of Technology,Harbin,150001,China) |
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| Abstract: | The 2-dimensional precision positioning table shows yaw error when moving along axial direction,which severely degrades the performance of the table.A novel precision positioning table based on real-time yaw error compensation is presented in the paper.Based on micro-displacement measuring technique,the yaw error measurement model of the novel table is established.By adopting the theory of Hertz contact,the rigidity model of the linear ball guideway and the yaw vibrational model of the macro-table are molded.The experimental result proves the validity of the yaw vibration model of the table.The performance of the precision positioning table is improved greatly by adopting micro-driven table to compensate the yaw error of the macro-table in real time. |
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| Keywords: | precision positioning error compensation linear ball guideway vibration |
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