| 氟卤气体传感器及其应用 |
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| 引用本文： | 崔志武,韦春才,等.氟卤气体传感器及其应用[J].沈阳工业大学学报,1993,15(1):41-45. |
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| 作者姓名： | 崔志武 韦春才 |
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| 作者单位： | 电子工程系 |
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| 摘 要： | 简要说明使用氟卤化合物对臭氧层的破坏，对地球生态环境的影响，为控制和监测大气中氟卤化合物，必须开发和研制氟卤气体传感器，重点介绍了半导体气体氟卤传感器及其应用。
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| 关 键 词： | 氟卤化合物 半导体传感器 |
The Sensor of Halogenated Hydrocarbon Gas and Its Application |
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| Chui Zhiwu,Wei Chuncai,Li Hetai.The Sensor of Halogenated Hydrocarbon Gas and Its Application[J].Journal of Shenyang University of Technology,1993,15(1):41-45. |
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| Authors: | Chui Zhiwu Wei Chuncai Li Hetai |
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| Abstract: | The destruction of ozone layer by halogenated hydrocarbon and its effect on bio- circumstance of earth has been described. It is necessary to develop a halogenated hydrocarbon sensor to monitor the halogenated hydrocarbon in the air. A semiconductor halogenated hydrocarbon sensor has been introduced in this paper, while some other type sensors and its application were mentioned as well. |
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| Keywords: | fluorine compounds semiconductor sensors application |
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