单视角SEM图像中操控工具的三维精确定位

在基于扫描电子显微镜(SEM)的纳米操作系统中,针对获取多视角图像比较困难,而单视角图像缺乏三维信息的问题.为了研究如何从单视角SEM图像中快速的实现操作工具的三维精确定位,采用基于梯度方向高斯曲线拟合亚像素的定位方法来实现水平坐标信息的精确定位,和基于图像相似度的原理来精确获取操控工具的垂直坐标信息.从单视角SEM图像中获取的实验数据表明,水平坐标信息已达到了亚像素级别的精确定位要求,而垂直坐标信息也可以在小范围移动中进行精确定位.

The Precise Three-dimensional Positioning of Manipulation Tool in Single-view SEM Image

In the telenanomanipulation system based on scanning electron microscope （SEM）, aiming at the problem it is difficult to obtain multi-view images from scanning electron microscope and the lack of three-dimen- sional information in single view images, and in order to study how quickly achieve the precise three-dimensional positioning of manipulation tool in single-view SEM image, sub-pixel edge detection algorithm based on the gradient direction of Gauss curve fitting is used to achieve precise positioning of the horizontal coordinate information, and image similarity degree is used to obtain manipulation tool＇s information of vertical coordinate information. The ex- perimental data obtained from the single-view SEM images show that the horizontal coordinate information has a- chieved sub-pixel level of accuracy, and the vertical coordinate information can be precise positioning in a small range of target.