机电集成静电谐波微型传动系统的Casimir力和强迫响应

提出一种机电集成静电谐波微型传动系统。随着传动尺寸的减小,分子力的影响变大,应该予以考虑。本文给出了同时考虑静电力和Casimir力时机电集成静电谐波微型传动系统对于电压扰动的强迫响应方程。运用该方程,研究了Casimir力对系统强迫响应的影响规律。结果表明：Casimir力对于系统强迫响应具有重要影响,随着柔轮与定子间初始间隙的减小和电压的增大,Casimir力对系统强迫响应的影响变大。研究结果对于该种传动系统的进一步小型化具有指导意义。

Casimir forces and forced response for electromechanical integrated electrostatic harmonic micro drive

An electromechanical integrated electrostatic harmonic micro drive is proposed.As reducing the dimension of the drive, the influence of the molecular forces is increased and should be considered.The forced response equations of the flexible ring for the drive to the electric excitation are deduced by considering electrostatic and the Casimir forces.Using the equation,the influences of the Casimir force on the forced responses of the flexible ring to the electric excitation are investigated.Results show：the Casimir force has obvious influences on the forced responses for the drive.As the initial clearance drops and the voltage grows between the flexible ring and the stator,the influences becomes larger.The results are useful in theory and technique studies on further miniaturization of the drive.