LiTaO3薄膜红外探测器热分析

利用有限元软件ANSYS对LiTaO3薄膜热释电红外探测器进行热分析;研究了敏感元绝热层的厚度与热导率以及基底的厚度及材料对热分析结果的影响;提出了优化方案,并给出优化前后仿真的对比结果。分析结果表明,探测器的热响应随绝热层的厚度增加而增加,随绝热层的热导率降低而增加。在硅、镍、蓝宝石三种基底材料中,使用蓝宝石的探测器的热响应效果最佳。在绝热层厚度为2 μm的情况下,基底的厚度对探测器响应的影响可以忽略。实验测试结果证实了优化模型的有效性。

Thermal Analysis of LiTaO3 Film Infrared Detector

Thermal analysis of LiTaO3 film infrared detector based on ANSYS has been studied in this paper. The influences on the thermal analysis results are obtained, through changing the substrate material and its thickness and the thickness and thermal conductivity of thermal-insulation layer of the LiTaO3 film infrare sensing element. The thermal response of the infrared detector increases with the thickness of thermal-insulation layer but is in inverse proportion to its thermal conductivity. Among the substrate materials of silicon, nickel, and sapphire, the LiTaO3 thin film infrared detector with sapphire substrate has the best thermal response. The influence of the thickness of substrate can be ignored when the infrared detector with 2 μm thick thermal-insulation layer. An optimized model is presented and the comparing simulation results of the optimized and the original are given out. The experiment result verifies the validity of the optimized model.