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精密微动平面电机线性功率驱动器设计与实现
引用本文:潘海鸿,李先导,陈琳. 精密微动平面电机线性功率驱动器设计与实现[J]. 电机与控制应用, 2010, 37(9)
作者姓名:潘海鸿  李先导  陈琳
作者单位:广西大学,机械工程学院,广西,南宁,530004
基金项目:广西制造系统与先进制造技术重点实验室资助项目,南宁市科技攻关项目,广西科技攻关项目 
摘    要:针对精密微动平面电机电流驱动特点及其功率驱动器高线性度要求,提出了一种高线性的功率驱动器电路设计。该电路采用电流负反馈技术实现电流稳定输出,采用线性大功率单片集成运算放大器OPA541作为功率输出器件,并通过可编程增益运放PGA205实现驱动器增益在线调整。试验结果表明,该功率驱动器最大非线性误差为0.86%,响应频率大于5kHz,满足通常平面电机高线性度和频响要求,为电流输出稳定性等性能的深入研究和系统完善奠定了基础。

关 键 词:平面电机  线性功率驱动器  线性度  响应频率

Design and Implementation of Linear Power Driver for Planar Motors Applied in Precision Nanopositioner Stage
PAN Hai-hong,LI Xian-dao,CHEN Lin. Design and Implementation of Linear Power Driver for Planar Motors Applied in Precision Nanopositioner Stage[J]. Electric Machines & Control Application, 2010, 37(9)
Authors:PAN Hai-hong  LI Xian-dao  CHEN Lin
Affiliation:PAN Hai-hong,LI Xian-dao,CHEN Lin(College of Mechanical Engineering,Guangxi University,Nanning 530004,China)
Abstract:Aiming at features of current drive and power amplifier output-input high-linearity requirements for planar motors applied in precision nanopositioner stage,a high-linearity power amplifier design was presented.The circuit realize that steady current output by current negative feedback technology,power output by high power monolithic power amplifier OPA541 and gain program by PGA205.The experimental results showed that linearity achieve 0.86% and response frequency was greater than 5 kHz,satisfying requirem...
Keywords:planar motor  linear power amplifier  linearity  response frequency  
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