Nd–Fe–B thick films prepared at the high deposition rate of 90 µm/h

After a postannealing process, the magnetic properties of pulsed laser deposition (PLD)‐made Nd–Fe–B film magnets prepared at the deposition rate of 20–90 µm/h showed constant values, and the average values of H_c, B_r and (BH)_max were 1050 kA/m, 0.6 T, and 60 kJ/m³, respectively. The obtained results were comparable to those previously reported. In conclusion, it was found that a maximum deposition rate of 90 µm/h could be achieved without deterioration of magnetic and mechanical properties. © 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.