Modeling of some electrical parameters of a MOSFET under applied uniaxial stress |
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Authors: | Amit Chaudhry Sonu Sangwan Jatindra Nath Roy |
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Affiliation: | 1. University Institute of Engineering and Technology, Panjab University, Chandigarh, India 2. Solar Semiconductor Private Limited, Hyderabad, India
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Abstract: | A semi analytical model describing the bulk mobility for electrons in strained-Si layers as a function of applied uniaxial
strain applied at the gate has been developed in this paper. The uniaxial stress has been applied through the silicon nitride
cap layer. The effects of uniaxial stress are understood on all the three components of mobility i.e. phonon, columbic and
surface roughness mobility. The results show that the electron mobility is a strong rising function of applied uniaxial strain.
Flatband voltage, Depletion Charge density, Inversion charge density, Energy gap and Effective surface electrical field have
been analytically modeled. There is a sharp increase in the vertical electrical field and inversion charge density and decrease
in the energy gap, depletion charge density and the flatband voltage when the uniaxial stress is applied. The electron mobility
results have also been compared with the experimentally reported results and show good agreement. |
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