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An Improved Energy Transport Model Suitable for Simulation of Partially Depleted SOI MOSFETs
Authors:H Kosina  M Gritsch  T Grasser  T Linton  S Yu  MD Giles  S Selberherr
Affiliation:(1) Institute for Microelectronics, TU Vienna, Gusshausstrasse 27–29, A-1040 Vienna, Austria;(2) Intel Corporation, 2200 Mission College Blvd., Santa Clara, CA 95051, USA
Abstract:When applied to partially depleted SOI MOSFETs, the energy transport model predicts anomalous output characteristics. The effect that the drain current reaches a maximum and then decreases is peculiar to the energy transport model. It is not present in drift-diffusion simulations and its occurrence in measurements is questionable. The effect is due to an overestimation of the diffusion of channel hot carriers into the floating body. A modified energy transport model is proposed which describes hot carrier diffusion more realisticly and allows for proper simulation of SOI MOSFETs.
Keywords:energy transport  moment equations  Boltzmann equation  device simulation  silicon on insulator
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