Single nanowire assembled by liquid dielectrophoresis for on-chip technologies

ABSTRACT

Study on dynamic tensile properties and atomic chain fabrication of single nanowire, for understanding its dynamic tensile properties and unique physical properties of atomic chain to fabricate atom scale devices, is one of frontier research issues in nano-scale science. However, how to assemble single nanowire on a tensible micro-structure becomes one of the most difficult problems, which severely restricts the development of this research field. In this paper, after the ultrahigh tensible microelectrode chip is fabricated by micro-electromechanical systems technology, hexamethyldisilazane is utilized to improve hydrophobicity of the chip, and then a micro-droplet dielectrophoresis experimental platform and technology is developed to assemble single nanowire on the sensible microelectrode. Experimental results show that accurate and efficient assembly of single Cu nanowire is realized, which contributes greatly to the further research of dynamic tensile properties and atomic chain fabrication. And for guiding the assembly experiments, finite element technology is also utilized to analyze the local micro electro-field around the microelctrodes during dieletrophoresis experiments.