| 超精密工作台洛伦兹电动机优化设计 |
| |
| 引用本文： | 刘羽,张鸣,朱煜. 超精密工作台洛伦兹电动机优化设计[J]. 微特电机, 2011, 39(10): 1-3,80 |
| |
| 作者姓名： | 刘羽 张鸣 朱煜 |
| |
| 作者单位： | 清华大学,北京,100084 |
| |
| 基金项目： | 国家高技术研究发展计划(863计划)项目 |
| |
| 摘 要： | 洛伦兹电动机广泛应用于超精密制造装备中。为提高洛伦兹电动机的推力输出和快速响应性能,降低发热功率,提出了一种综合评价超精密工作台驱动电机性能的优化指标。基于该优化指标,采用COMSOL Mu l-tiphysics和M atlab联合仿真方法,对一种Halbach磁钢阵列构型的洛伦兹电动机进行了尺寸参数优化设计。样机实验证明,优化后的洛伦兹电动机推力可以达到26.3 N/A,同时保证电气时间常数小于1 m s。
|
| 关 键 词： | 超精密工作台 洛伦兹电动机 优化设计 快速响应性能 |
Optimization of Lorentz Motor Used in Ultra-Precision Stages |
| |
| LIU Yu,ZHANG Ming,ZHU Yu. Optimization of Lorentz Motor Used in Ultra-Precision Stages[J]. Small & Special Electrical Machines, 2011, 39(10): 1-3,80 |
| |
| Authors: | LIU Yu ZHANG Ming ZHU Yu |
| |
| Affiliation: | LIU Yu,ZHANG Ming,ZHU Yu(Tsinghua University,Beijing 100084,China) |
| |
| Abstract: | Lorentz motor is widely used in the ultraprecision manufacturing equipments.A novel criterion was proposed for optimization of Lorentz motor to improve dynamic response and decrease heat dissipation.The structure dimensional parameters of a Lorentz motor with Halbach magnet arrays was optimized by combined analysis of COMSOL Multiphysics and Matlab.The resulting Lorentz motor is validated by the experiment on prototype of which the force output is 26.3 N/A and the electrical time constant is less than 1 ms. |
| |
| Keywords: | ultra-precision stages Lorentz motor optimization dynamic response capability |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
