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直线超声波电动机精密定位系统位置精确控制
引用本文:毛新丰,孙志峻,姚志远,冒娟娟.直线超声波电动机精密定位系统位置精确控制[J].微特电机,2011,39(6):66-68,76.
作者姓名:毛新丰  孙志峻  姚志远  冒娟娟
作者单位:南京航空航天大学,江苏南京,210016
基金项目:NSFC-广东联合基金重点项目
摘    要:针对直线超声波电动机驱动的精密定位平台,建立了一个完整的闭环控制系统,集人机交互、数据采集显示和位置精确控制于一体。在单纯PID连续控制无法达到理想控制目标的情况下,结合超声波电动机的控制特点,借助其在极短脉冲激励下运行高分辨率的优势,融合了微步控制的思想,最终使系统达到了较好的控制品质。实验表明,系统在不同行程下的重复定位精度在0.5μm以内,且运行平稳、快速。

关 键 词:直线超声波电动机  精密定位  PID  微步控制

Accurate Position Control of Positioning System Driven by Linear Ultrasonic Motor
MAO Xin-feng,SUN Zhi-jun,YAO Zhi-yuan,MAO Juan-juan.Accurate Position Control of Positioning System Driven by Linear Ultrasonic Motor[J].Small & Special Electrical Machines,2011,39(6):66-68,76.
Authors:MAO Xin-feng  SUN Zhi-jun  YAO Zhi-yuan  MAO Juan-juan
Affiliation:MAO Xin-feng,SUN Zhi-jun,YAO Zhi-yuan,MAO Juan-juan(Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
Abstract:A precision positioning stage driven by a linear ultrasonic motor was introduced.A complete closed-loop control system was established,integrating human-machine interaction,data acquisition and display,and precise control of position.PID algorithm was applied to control the positioning stage but it can not achieve the desired objectives.Thanks to the control features of linear ultrasonic motors,with the advantage of its high move-resolution when stimulated by ultra-short pulse,micro-step control strategy wa...
Keywords:linear ultrasonic motor  precision positioning  PID  micro-step control  
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