| MEMS技术在微型电磁继电器应用中的探讨 |
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| 引用本文： | 任万滨,翟国富,李德胜,肖伟耀.MEMS技术在微型电磁继电器应用中的探讨[J].机电元件,2004,24(3):3-5,17. |
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| 作者姓名： | 任万滨 翟国富 李德胜 肖伟耀 |
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| 作者单位： | 1. 哈尔滨工业大学军用电器研究所,黑龙江,哈尔滨,150001
2. 北京工业大学机电学院,北京,100022 |
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| 基金项目： | 国家 8 63计划资助项目 ( 2 0 0 3AA40 414 0 ) |
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| 摘 要： | 基于微机电系统(MEMS)技术研制的微型继电器具有体积小、功耗低、开关迅速、稳定性高等优势，将有效弥补传统电磁继电器和固态继电器之间的不足。以一种微机械电磁继电器为例，介绍了应用MEMS技术的微型电磁继电器的结构特点和工作原理，并分析了影响其动作性能指标的关键参数，最后介绍了MEMS加工制作工艺特点及今后的研究方向。
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| 关 键 词： | 微型电磁继电器 微型继电器 动作性能 固态继电器 开关 功耗 MEMS技术 微机电系统（MEMS） 体积小 微机械 |
| 文章编号： | 1000-6133(2004)03-0003-03 |
Discussion on Micro Electromagnetic Relay Based on MEMS Technology |
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| REN Wan-bin ,ZHAI Guo-fu ,LI De-sheng ,XIAO Wei-yao.Discussion on Micro Electromagnetic Relay Based on MEMS Technology[J].Electromechanical Components,2004,24(3):3-5,17. |
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| Authors: | REN Wan-bin ZHAI Guo-fu LI De-sheng XIAO Wei-yao |
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| Affiliation: | REN Wan-bin 1,ZHAI Guo-fu 1,LI De-sheng 2,XIAO Wei-yao 1 |
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| Abstract: | With the advantage of small volume, low power consumption, quickly switch, and high stability, the micro electromagnetic relays based on MEMS technology will cover the shortage between traditional electromagnetic relay and solid state relay. The design feature and operation principle of micro electromagnetic relay was illustrated by a micromechanical electromagnetic relay in this paper, and some key parameters influence movement performance was analyzed. In the end, fabrication features of MEMS and future research direction was stated. |
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| Keywords: | MEMS micro electromagnetic relay magnetic microactuator |
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