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| 基于MEMS技术的汽车传感器研究进展 | |
| 引用本文： | 吕良,邓中亮,刘玉德,辛洪兵.基于MEMS技术的汽车传感器研究进展[J].电工技术学报,2007,22(4):77-84. |
| 作者姓名： | 吕良 邓中亮 刘玉德 辛洪兵 |
| 作者单位： | 1. 北京邮电大学自动化学院,北京,100876;北京工商大学机械自动化学院,北京,100037 2. 北京邮电大学电子工程学院,北京,100876 3. 北京工商大学机械自动化学院,北京,100037 |
| 基金项目： | 北京市教育委员会科技发展计划资助项目(KM200610011003) |
| 摘 要： | 随着汽车传感器的迅速发展和对MEMS(微机电系统)技术研究的深入,基于MEMS技术的汽车传感器具有广阔的应用前景。本文就MEMS汽车传感器的研究应用现状、MEMS汽车传感器的分类、制作加工技术和工艺等进行了简述,并详细介绍了几种典型的MEMS汽车传感器,最后对MEMS汽车传感器今后的发展进行了探讨。 |
| 关 键 词： | 汽车电子 汽车传感器 微传感器 MEMS技术 |
| 修稿时间： | 2006年6月30日 |
Research on Automotive Sensors Based on MEMS |
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| Lü Liang,Deng Zhongliang,Liu Yude,Xin Hongbing.Research on Automotive Sensors Based on MEMS[J].Transactions of China Electrotechnical Society,2007,22(4):77-84. | |
| Authors: | Lü Liang Deng Zhongliang Liu Yude Xin Hongbing |
| Affiliation: | 1. Beijing University of Posts and Telecommunications Beijing 100876 China 2. Beijing Technology and Business University Beijing 100037 China |
| Abstract: | Along with rapid development of the automotive sensors and the farther research of MEMS technology, the automotive sensors based on MEMS have extensive applied foreground. In this paper, the present application and the classification of the MEMS automotive sensors are introduced. Several manufacturing methods are narrated in more detail. And a few typical models of the MEMS automotive sensors are given in detail. In the end the future trend of the MEMS automotive sensor is pointed out. |
| Keywords: | Automotive electronics automotive sensors micro-sensors MEMS technology |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |