基于PLC的多晶硅热分解炉监控系统设计

根据某多晶硅生产厂热分解工段的工艺流程及控制要求,设计了一套热分解炉控制系统;针对硅烷法生产多晶硅时分解反应需极高安全性,介绍了多晶硅生产的主要设备,分析了系统硬件构成及软件控制流程;提出了将PLC与工业以太网技术相结合,通过组态软件实现上位机监控的系统,并在工艺要求下,实现热分解炉温度PID控制;经试运行及实际生产表...

Design of Polycrystalline Silicon Decomposition Furnace Monitor System Based on PLC

According to the craft process and requirements of heat decomposition section in a certain polycrystalline silicon factory,the heat decomposition control system was designed.When people use silane decomposition reaction to produce the polycrystalline silicon,it requires high security,for this reason,the main facilities of the polycrystalline silicon production was introduced,the hardware structure and software control flow of the system was analyzed,and put forward a scheme which combines the PLC with industrial Ethernet.The configuration software was used to realize the monitor of the upper PC system.And the PID control of the heat decomposition furnace was realized under the requirement of the craft.The practical results show that the system is reliable and steady.Its control meets the requirements of process and can produces high-purity polycrystalline silicon.