射频电源研究综述

射频电源是可以产生固定频率的正弦波、具有一定频率的高频电源,主要由射频信号源、射频功率放大器及阻抗匹配器组成,射频电源作为等离子体配套电源,广泛应用于半导体工艺设备、LED与太阳能光伏行业、科学实验中的等离子体发生、射频感应加热、医疗美容及常压等离子体消毒清洗等领域.本文梳理了国内外射频电源发展现状,重点分析电子管射频电源及晶体管射频电源的发展历程及主要技术区别,并详述国内外射频信号源、射频功率放大器及阻抗匹配器技术发展.在此基础上,对我国射频电源的发展提出合理性的建议.

Overview of research on RF power supply

RF power can generate a fixed frequency sine wave,high frequency power supply with a certain frequency,consisted of RF signal source,RF power amplifier and impedance matching device.The RF power as the plasma power supply,widely used in semiconductor processing equipment,LED and solar photovoltaic industry,plasma in scientific experiments,RF induction heating,plasma cleaning and disinfection of medical beauty and other fields.The RF power amplifier is the core of the RF power.This paper reviews the development status of domestic and foreign RF power,focus on analysis of the development of the RF power supply and RF power transistors and main technical differences,and on the domestic and foreign RF signal source,RF power amplifier and impedance matching development technology.On this basis,put forward suggestions on the rationality of the development of China's radio frequency power supply.