一种系统级微机械振动陀螺的设计与仿真

针对微机械传感器设计存在的流片成本高、耗时长等问题,在ConventorMEMS+和Matlab/Simulink环境下设计了一种静电驱动的微机械振动陀螺,对模型进行系统级的仿真测试。通过模态分析、直流分析、交流分析等方法优化模型结构,同时结合虚拟体硅刻蚀工艺抽取建立了微机械振动陀螺的传递函数模型,在Simulink中进行系统级仿真分析,获得了系统的暂态响应,确定其在开环条件下的谐振频率、安全工作电压、最佳驱动电压频率等关键参数,并得到谐振频率随梁的长度、宽度参数变化的关系。经测试,在工作电压和其他条件相同的情况下,微机械振动陀螺在需要检测的两个模态上谐振频率与仿真分析结果相差仅约3.8%和0.4%,说明系统级仿真结果可以为后续微机械陀螺闭环测控电路设计提供理论和实验依据。

Design and simulation of a system-level Micromachined gyroscope

To solve the problem of high cost and time consuming when the key parameters of micromechanical structure must be encapsulated by wafer flow, an electrostatic driven micromechanical vibration gyro was designed in ConventorMEMS+ and Matlab/Simulink environment, and the model was simulated and tested at the system level. Through modal analysis, DC analysis, AC analysis and other methods to optimize the model structure, combined with virtual body silicon etching process extraction to establish a micromechanical gyro transfer function model, system level simulation analysis in Simulink, obtained the transient response of the system. The key parameters, such as resonant frequency, safe operating voltage and optimal driving voltage frequency, are determined under the condition of open loop, and the relationship between resonant frequency and the length and width of beam is obtained. Under the same working voltage and other conditions, the difference between the resonant frequency and the simulation results is only about 3.8% and 0.4%, indicating that the system-level simulation results can provide theoretical and experimental basis for the subsequent design of the closed-loop measurement and control circuit of the micro-mechanical gyro.