Abstract: | We succeeded in depositing 200‐ to 300‐µm‐thick Nd‐Fe‐B film magnets with (BH)max of approximately 55 kJ/m3 on Fe substrates by the PLD method. In addition, we confirmed that a millimeter‐size motor, which was prepared from the obtained film, rotates at 15,160 rpm under a no‐load test. © 2007 Wiley Periodicals, Inc. Electr Eng Jpn, 159(2): 1–6, 2007; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/eej.20215 |