| 基于VI的恒温区段测量系统设计 |
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| 引用本文： | 王彦芳,封筠,贺海宏,韩江河.基于VI的恒温区段测量系统设计[J].微计算机信息,2006,22(13):170-171. |
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| 作者姓名： | 王彦芳 封筠 贺海宏 韩江河 |
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| 作者单位： | 1. 050043,石家庄铁道学院;100022,北京工业大学嵌入式系统实验室
2. 050043,石家庄铁道学院 |
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| 基金项目： | 教育部"211工程"项目 |
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| 摘 要： | 在半导体器件的生产过程中需要定期测量扩散炉、合金炉的恒温区段,针对人工测量效率低,精度差等问题,设计了基于LabVIEW虚拟仪器的恒温区自动测量系统,阐述了系统的组成和测量原理。
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| 关 键 词： | 虚拟仪器 恒温区 测量 |
| 文章编号： | 1008-0570(2006)05-1-0170-02 |
| 修稿时间： | 2005年9月12日 |
The Automatic Constant Temperature Length Measure System Basing on the Virtual Instruments |
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| Wang Yanfang,Feng Jun,He Haihong,Han Jianghe.The Automatic Constant Temperature Length Measure System Basing on the Virtual Instruments[J].Control & Automation,2006,22(13):170-171. |
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| Authors: | Wang Yanfang Feng Jun He Haihong Han Jianghe |
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| Abstract: | In a semiconductor device production line, the constant temperature segment of a diffusion furnace have to be measured regularly. And the working efficiency and precision is low. In stead of this manually system, an automatic constant temperature mea- surement system basing on the virtual instrument has been designed. The configuration and principle of the auto- measure system is given in the paper. |
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| Keywords: | Virtual Instrument constant temperature range measurement |
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