| CAD/CAE系统中静电性能和机电性能仿真 |
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| 引用本文： | 陈爱戎,张文祥.CAD/CAE系统中静电性能和机电性能仿真[J].计算机仿真,2007,24(7):280-282,346. |
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| 作者姓名： | 陈爱戎 张文祥 |
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| 作者单位： | 浙江万里学院智能控制技术研究所,浙江,宁波,315100 |
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| 摘 要： | 在常规机械中很少考虑的微小静电力会对MEMS的电路产生一定影响,同时MEMS的元件在静电力作用下会发生变形,进而使得MEMS的几何结构和电容等产生变化,加之目前MEMS试制成本较高,因此,必须对整个系统的静电性能和机电性能进行分析.利用边界元素法,对MEMS各元件进行静电性能分析;采用有限元分析软件包对MEMS作机电性能分析,探讨了驱动电压与位移的关系、位移变化与电容的关系等.通过仿真测试发现,可提高设计质量,降低成本,缩短研制周期.
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| 关 键 词： | 微机电系统 静电性能 机电性能 系统 静电性能 机电性能 性能仿真 Performance Electromechanical Static Electricity Simulation 研制周期 降低成本 设计质量 发现 仿真测试 位移变化 关系 驱动电压 软件包 有限元分析 性能分析 边界元素法 |
| 文章编号： | 1006-9348（2007）07-0280-03 |
| 修稿时间： | 2007-01-242007-04-26 |
Simulation of Static Electricity Performance and Electromechanical Performance of CAD/CAE System |
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| CHEN Ai-rong,ZHANG Wen-xiang.Simulation of Static Electricity Performance and Electromechanical Performance of CAD/CAE System[J].Computer Simulation,2007,24(7):280-282,346. |
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| Authors: | CHEN Ai-rong ZHANG Wen-xiang |
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| Affiliation: | Zhejiang Wanli University, Ningbo Zhejiang 315100, China |
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| Abstract: | Tiny electrostatic force in routine machinery may affect the MEMS circuit and deformation of MEMS component may happen due to the electrostatic force,thus leading to the change of the MEMS geometry structure and capacitance,and besides,the MEMS trial-production is costly at present.Therefore,the static electricity function and electromechanical function must be analyzed.The border element law is used to analyze every component's static electricity function,and the finite element method is used to analyse the electromechanical function on MEMS.The relation between drive voltage and displacement,displacement change and capacitance etc.are discussed. |
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| Keywords: | Micro electro mechanical system Static electricity function Electro mechanical function |
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