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Dynamic scheduling of photolithography process based on Kohonen neural network |
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| Authors: | Bing-hai Zhou Xin Li Richard Y K Fung |
| Affiliation: | 1. School of Mechanical Engineering, Tongji University, Shanghai, 201804, People’s Republic of China 2. Department of Systems Engineering and Engineering Management, City University of Hong Kong, Hong Kong, People’s Republic of China |
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