| 解耦型静电力闭环微陀螺 |
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| 引用本文： | 刘宗林,李圣怡,吴学忠.解耦型静电力闭环微陀螺[J].传感技术学报,2005,18(2):401-405. |
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| 作者姓名： | 刘宗林 李圣怡 吴学忠 |
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| 作者单位： | 国防科技大学机电工程研究所,长沙,410073;国防科技大学机电工程研究所,长沙,410073;国防科技大学机电工程研究所,长沙,410073 |
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| 摘 要： | 微陀螺采用双框架双支撑解耦结构实现X-Y方向运动相对独立,驱动模态采用叉指电容结构实现大范围静电驱动,敏感模态方向采用差分电容作为检测接口实现高精度位置测量.X方向设计了独立的位移检测单元,而Y方向配置了静电力反馈单元,实现系统的闭环静电力反馈控制,提高传感器的性能.为分析提高系统输出精度的条件,推导出影响系统检测灵敏度的因素,改进了驱动模态闭环方案,提出了敏感模态无相差静电力反馈方法.
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| 关 键 词： | 微机电系统 叉指驱动 微陀螺 |
| 文章编号： | 1005-9490(2005)02-0401-05 |
| 修稿时间： | 2004年9月6日 |
A Decoupled Microgyroscope with Electrostatic Force Feedback |
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| L I U Zong??l in,L I S heng??y i,WU X ue??z hong.A Decoupled Microgyroscope with Electrostatic Force Feedback[J].Journal of Transduction Technology,2005,18(2):401-405. |
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| Authors: | L I U Zong??l in L I S heng??y i WU X ue??z hong |
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| Affiliation: | Mec hatr oni cs En gineering R esearc h Inst itut e , N ati onal Uni v ersi ty of De f ence T ech nol ogy , Chang sha 410073, China |
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| Abstract: | The microgyroscope realizes decoupled motion in x and y direction with double frames and double supporting beams. Comb driving is used to achieve large movement range in driving mode. Differential Capacitors are employed to gain nice displacement detecting in sensing mode. Displacement sensing in X direction and electrostatic force driving structure in Y direction is added to form feedback control. Some conditions are put forword to improve the sensor's precision and sensing sensitivity. Closed control in driving mode is improved on and electrostatic force feedback with no phase error in sensing mode is implemented. |
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| Keywords: | Micro-electro-mechatronics system Comb drive Microgyroscope |
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