一种柔性三维力触觉传感器阵列的实现方法

介绍了一种可安装在曲面上,对三维力进行检测的柔性三维力触觉传感器阵列的实现方法.首先采用MEMS技术制备三维力触觉传感器阵列,再将多个三维力触觉传感器单元分别通过倒装焊技术集成在已加工好的柔性电路板基底上,实现了传感器与信号处理电路的互连和传感器阵列(4×4)的柔性化.采用信号选通的多路信号采集方法简化了传感器阵列的信号处理电路.测试结果表明,柔性触觉传感器阵列可弯曲变形90°以上,检测三维力的分辨率达到0.1 N.

The Preparation Method of A Flexible Tactile Sensors Array for three-dimensional force measurement

This paper described a process method of flexible three-dimensional force tactile sensor array that may install in the curved surface. First, the three-dimensional force tactile sensor array be made by MEMS technology. Second, many three-dimensional force tactile sensor unit separately be integrated on the flexible PCB by flip chip technology. This process has realized the interlink of the sensor and signal processing electric circuit unit, and flexibility of the sensor array (4×4). Uses the multichannel signal elects to pass to simplify the sensor array signal processing electric circuit. The test result indicated that, the flexible three-dimensional force tactile sensor array may bending strain above 90o, the detection three dimensional foece limit achieve 0.1N.