大行程纳米级压电微动工作台的设计与试验研究

介绍了一种基于尺蠖运动原理的大行程纳米级级平台式步距压电微动台.在结构设计方面.夹紧器和驱动器都采用压电陶瓷对称结构,配合夹紧器的夹紧、放松.驱动器伸长或缩短,实现推一拉接力运动,保证微动台运动的平稳性和连续性;采用平台式结构.增强了其实用性.驱动控制方面.配以适当的四路驱动信号.实现了压电微动台的单步、多步连续匀速运动.通过试验对微动台的性能进行了测试,结果表明:微动台的运动位移是线性的,运动速度在驱动电压为200V可达13.9μm/s,最小步距小于10 nm,行程大于20 mm.

Study on design and experimentation of Piezoelectric Micro-moving Platform with Nano-Step and long-range

A kind of piezoelectric micro-moving platform with long-range and nano-step has been developed,which is based on inchworm motion.The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship.By clamping or releasing of clampers and extending or retracting of actuators,it could achieve a kind of push-pull relay movement.In this way,the movement of platform is smooth and continuous.With the proper four-channels driving signals,the platform is moved linearly w...