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硅纳米梁的静态特性分析
引用本文:鲍芳,于虹,黄庆安.硅纳米梁的静态特性分析[J].传感技术学报,2006,19(5):1713-1716.
作者姓名:鲍芳  于虹  黄庆安
作者单位:东南大学MEMS教育部重点实验室,南京,210096
基金项目:国家重点基础研究发展计划(973计划)
摘    要:提出了用于分析硅纳米梁静态弯曲的半连续体模型.与传统的连续体模型相比,该方法考虑了厚度方向进入纳米尺度所带来的物理特性的离散化现象.基于Sun-Zhang提出的应变能量计算模型,运用变分原理,推导出半连续体模型.从计算结果可以看出,几何尺寸和表面原子的重构、弛豫效应对梁的弯曲有一定影响.该模型分析梁的弯曲得到的结果与连续体模型相比偏小,随着尺寸的增大误差逐渐减小,在宏观尺寸下两种模型最终趋于一致.

关 键 词:应变能量  变分  重构、弛豫  弯曲
文章编号:1004-1699(2006)05-1713-04
修稿时间:2006年7月1日

Static Analysis for the Si Nanoscaled Clamped Beam
BAO Fang,YU Hong,HUANG Qing-an.Static Analysis for the Si Nanoscaled Clamped Beam[J].Journal of Transduction Technology,2006,19(5):1713-1716.
Authors:BAO Fang  YU Hong  HUANG Qing-an
Affiliation:Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
Abstract:A new semicontinuum model is presented to calculate the static bending of a nanoscaled clamped-clamped silicon beam. In comparing with the traditional continuum medium theory, it accounts for the discrete nature in the thickness direction of the beam. Based on the strain energy model presented by Sun&Zhang and the energy variational calculus, we calculate the bending of a nanoscaled silicon beam. Investigating the obtained deflection and bending curve, it is found that the nanoscale and the surface reconstruction and relaxation have a significant effect on the deflection curve. The value of deflection is a little smaller than its counterpart values of the traditional continuum theory model, and the difference approaches zero as the scale increases.
Keywords:strain energy  variational calculus  reconstruction (relaxation)  bending
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