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基于二元多项式拟合法的压力传感器输入信号重构
引用本文:王建飞,刘歌群,闫建国,卢京潮.基于二元多项式拟合法的压力传感器输入信号重构[J].传感技术学报,2005,18(3):522-524.
作者姓名:王建飞  刘歌群  闫建国  卢京潮
作者单位:西北工业大学,自动化学院,西安,710072
摘    要:为了同时解决压力传感器输出特性的非线性和温度漂移问题,提出利用二元多项式根据传感器输出信号及其内部温度来重构被测压力.给出了被测压力重构模型的具体形式,以传感器静态特性标定试验数据为依据,利用最小二乘法求解模型系数矩阵,利用单点最大拟合误差、误差平方和模型阶次三项指标进行模型择优.基于重构模型给出了测量电路检测精度估算方法.本方法在传感器静态特性标定数据范围内得到了便于工程计算的一致表达式,同时解决了传感器的非线性和温度漂移两个主要问题,计算所用数据量大大小于插值法.某型硅谐振压力传感器的应用验证了本方法的合理性和有效性.

关 键 词:压力传感器  信号重构  二元多项式拟合  最小二乘法  精度估算
文章编号:1005-9490(2005)03-0522-03
收稿时间:2004-12-06
修稿时间:2004年12月6日

Reconstruction of Pressure Sensor Input Signal Based on Bivariate Polynomial Fitting Method
WA N G J i anf ei,L IU Gequn,YA N J i ang uo,L U J i ngchao.Reconstruction of Pressure Sensor Input Signal Based on Bivariate Polynomial Fitting Method[J].Journal of Transduction Technology,2005,18(3):522-524.
Authors:WA N G J i anf ei  L IU Gequn  YA N J i ang uo  L U J i ngchao
Abstract:To overcome the output nonlinearity and temperature drift of pressure sensor, the method to reconstruct the input pressure with sensor output and sensor temperature using bivariate polynomial is proposed. After given the reconstruction model, the coefficients matrix in the model is computed from sensor static character calibration data by the least square method, and the best model structure is chosen according to three performance indexes, maximum fitting error, sum of squared errors and model order. The method to estimate resolution of measuring circuits is presented based on the model obtained. The advantage of the method proposed here is that it provides a way to get a consistent expression at the range of sensor calibration data, which eliminates the effect of output nonlinearity and temperature drift of the sensor and demands least data stored than the interpolation. Application on a type of silicon resonant pressure sensor validates the rationality and affectivity of this method.
Keywords:pressure sensor  signal reconstruction  bivariate polynomial fitting  least square method  precision estimation
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