中国微米纳米----氧化锡气敏薄膜的喷墨打印技术研究

喷墨打印技术具有无需掩膜图形化、室温加工、方便操作等优点.利用喷墨打印技术在微热板上打印SnO2多孔薄膜.根据打印机的定位精度和微热板的悬空尺寸设计了打印图形,根据目标厚度确定打印层数,以及打印后的干燥工艺参数;通过扫描电镜对薄膜结构进行微观表征,敏感薄膜表面平整,成膜均匀;最后对其进行气敏测试,当微热板工作在250 ℃时,打印的SnO2气敏薄膜对乙醇有良好的响应,检测到最低乙醇浓度为0.5×10-6,响应和恢复时间均在3 s左右.

Study on Ink-jet printing technology of tin oxide gas sensitive film

Ink-jet printing technology works in the room temperature without mask graphical and operates conveniently.Ink-jet printing technology is used in the micro-hotplate gas sensor for printing SnO2 thin film.Printing pattern is designed according to the positioning precision of the printer and the suspended structure size of the MHP.The target thickness determined the numbers of printing layer and drying process parameters after printing are studied.The structure and characteristic of the SnO2 thin film on MHP are determined by scanning electron microscopy(SEM).The sensitive thin-film surface is smooth and uniform.Furthermore,sensing properties of the sensor are investigated.The results show that at 250 ℃ the sensor is quite sensitive to ethanol,the lowest concentration of ethanol that could be detected is 0.5×10-6,and the response time and recovery time are both shorter than 3 seconds.