硅微振梁式加速度传感器中微杠杆结构的设计

提出了一种采用微杠杆结构进行惯性力放大的硅微振梁式加速度传感器结构,阐述了其工作机理.在此基础上,讨论了两种不同的支点形式,分别推导了这两种结构形式的放大倍数计算公式,发现Ⅰ型支点形式的放大倍数略高于Ⅱ型支点,并采用有限元方法进行了仿真;分析了支点刚度以及输出轴刚度对放大倍数的影响;提出了微杠杆结构设计的原则.

Micro Leverage Design for Micromechanical Silicon Oscillating Accelerometer

A micromechanical silicon oscillating accelerometer with a micro leverage mechanism amplifying the inertial force is presented. The operation principal of the accelerometer is introduced. Two kinds of flexure pivot designs in micro leverage mechanism are discussed, and the equations for calculating the amplification factor are derived. The amplification effect of these two configurations is analyzed and simulated for the purpose of comparison. It is found that the first kind had a slightly bigger amplification factor than the second kind for the same dimensions. The effect of pivot spring and output system constants on the amplification factor is analyzed. Based on the theories found for the single-stage micro leverage mechanism, the design method is presented.