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基于声波的微粒操控型微流控芯片仿真分析
引用本文:朱叶子,刘慧琴,舒溪,国世上.基于声波的微粒操控型微流控芯片仿真分析[J].传感技术学报,2018,31(8):1147-1152.
作者姓名:朱叶子  刘慧琴  舒溪  国世上
作者单位:武汉大学物理科学与技术学院,人工微纳结构教育部重点实验室,武汉430072
基金项目:国家自然科学基金面上项目(81572860)
摘    要:利用有限元仿真软件COMSOL,对基于声表面行波(tsaw)粒子分选芯片及体声波(baw)粒子富集芯片进行了分析并加以实验验证.在仿真软件中分别模拟声表面行波粒子分选芯片的声波传播、声场形成、粒子轨迹以及体声波粒子富集芯片的声场形成、粒子轨迹,分析其运作机理,对肉眼不可见的声波、声场分布做出可视化效果.实验结果说明这两种芯片基于不同原理,都可对微米级的硅球完成可控的操作,并对于后续的器件创新和优化打下基础.

关 键 词:微流控  微粒操控  有限元仿真  声表面行波(tsaw)  体声波(baw)

Simulation of Acoustic Control of Microspheres Manipulations in Microfluidic Chips
ZHU Yezi,LIU Huiqin,SHU Xi,GUO Shishang.Simulation of Acoustic Control of Microspheres Manipulations in Microfluidic Chips[J].Journal of Transduction Technology,2018,31(8):1147-1152.
Authors:ZHU Yezi  LIU Huiqin  SHU Xi  GUO Shishang
Abstract:This work reported the simulations of microsphere manipulations via TSAW and BAW using finite element analysis software (COMSOL MULTIPHYSICS) and verified the feasibility by devices fabrication and silicon microsphere experiment. Simulations included the displacement of acoustic wave, distribution of acoustic field, microspheres tracing of TSAW devises and distribution of acoustic field, microspheres tracing of BAW devises, respectively. Experiment results approved those two chips could complete controllable microsphere manipulations. The visualizations of theories would be the foundation of following devise innovations and optimizations.
Keywords:microfluidic  microspheres manipulation  FEM simulation  traveling surface acoustic wave  bulk acoustic wave
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