梳齿式微机械加速度计的研制

微机械加速度计作为微机电系统(MEMS)的一个重要产品,目前已经得到了广泛应用.本文首先从整体上提出了微机械加速度计的工作原理和数学模型,并着重讨论了各个部分之间的关系;然后根据敏感元件的特性,对伺服回路的几个关键参数,即预载电压、PID校正参数和反馈增益,进行了分析;本文最后给出了一种加速度计整体性能的测试结果,结果表明:微机械加速度计的量程为±15gn,非线性度为0.041 9%,阈值为0.15 mgn,2 h稳定性误差为0.084 5 mgn,逐次启动重复性误差为0.156 mgn.

Design and Realization of Comb-finger Micromechanical Accelerometer

As an important device of MEMS, Micromechanical accelerometer has been widely used in commercial and military fields. This paper presents the design and realization of the Micromechanical accelero- meter. At first, the configuration principle and mathematical model of the Micromechanical accelerometer servo system, especially the relationships among its parts, are discussed. And then, key parameters, which are preload voltage, PID correction parameters and feedback gain, are specific analyzed. Finally, the accelerometer is tested in the lab, the measurement range of it is ±15g, the nonlinear scale is 0.0419%, the threshold value is 0.1mg, the standard deviation of two hours operating is 0.0845mg and the 20 times turn-on repeatability error is 0.156mg.