微机械角速率传感器的性能分析

中等精度的微机械角速率传感器具有成本低、可靠性高、体积小、重量轻等优点，在民用和军用领域有着广泛的应用前景，具有很强的前沿性；目前世界各国对其非常关注并投入了大量研制和开发费用，根据国际发展趋势和我国的需求，我们研制了静电驱动的振动轮式微机械陀螺仪，本文主要针对这处微机械陀螺仪的特性进行分析，从原理，动力学方程出发，推导出了此类陀螺的检测输入角速度灵敏度；开环、半环传递函数；交流反馈控制提取同相

Performance Analysis of a Vibratory Wheel Micromechanical Gyroscope

Abstract Micromechanical inertial instruments with moderate accuracy have the great ad-vantage of low-cost, high reliability, small size, light weight, etc. They can content thefields of tactical weapons systems, industrial and commercial applications. Now, manycountries in the world have put much more attention and a large amount of R. D. fund tothem. According to the trend of research and the requirement of our country, we have de-signed a vibratory wheel rate gyro with static-electrical drive, and capacitance detection.In this paper, the performances of this gyroscope, including the sensitivity, open-loop adclose-loop transform functions of detecting inertial rate are derived, ac feedback control toextract the in-phase component and orthogonal component from original signal is present-ed, and the method of using close-loop control to improve the dynamic measurement band-width is given.