六轴加速度计的结构原理与阻尼振动设计

静电悬浮加速度计为当前国际上精度最高的一类加速度计 ,本文的设计目标为 :量程 12 .5 μgn,灵敏度 1ngn,带宽 0 .1Hz。从静电悬浮加速度计的敏感结构设计出发 ,详细地论述了该类加速度计的电容位移检测原理和微弱加速度检测原理。通过适当的电极配置设计 ,并对六路差分电容输出进行适当的线性组合 ,探讨了该加速度计的六轴检测功能 (三个线加速度和三个角加速度 )。随后对该加速度计的静电悬浮支承系统进行了振动学分析 ,采用 1atm的空气阻尼 ,得出系统的阻尼振动频率为 0 .82 5 Hz,输出采样间隔为 4 s。本文的设计对研制高精度多轴加速度计具有重要参考价值。

Mechanics Principle and Damping Design of a Six-Axial Accelerometer

Electrostatically suspended accelerometer is a k ind of accelerometerw ith the h ighest p recision in the world. The design objective of the accelerometer described in the paper is: Range of 12. 5 Lg n , Sensitivity of 1 ng n , and F requency Bandw idth of 0. 1 Hz. Based on the design of the mechanics, the paper describes, in de2 tail, the measurement p rincip les of disp lacement and m icro2acceleration. Then, it p robes into the possibility of six2axialmeasurement by p roper design of the capacitance electrodes. F inally, it analyses the system of electro2 static suspension of the acceleromenter. The analysis result indicates that the damp ing vibration frequency of the system is 0. 825 Hz, and the detecting circuit for accelerations should have a samp ling time interval of 4 s. The paper may have important values for the development of the h igh2p recision multi2axial accelerometers.