车载环境下MEMS微镜长期可靠性及控制方法

作为一种新型微光机电系统，MEMS微镜可完成微尺度下的光调控工作，在光电通信、医疗成像、民用投影、雷达探测等领域应用广泛.近年来，以微镜为核心部件的MEMS激光雷达因其体积小和功耗低等优势，有望成为更具竞争力的辅助驾驶传感器之一.然而，鉴于车载应用特殊性，MEMS微镜在温湿、电磁、振动和冲击等复杂多物理场耦合环境下的各类可靠性问题严重制约了MEMS激光雷达的工程应用.本文立足MEMS微镜可靠性研究领域，综述其在高频振动、温湿循环、电磁耦合等极端环境下的分层翘曲、结构断裂、静电吸合、短路烧毁等复杂失效形式及失效机制，总结了MEMS微镜常见动力学建模理论及控制方法，讨论并展望了MEMS激光雷达车规化面临的主要挑战和发展趋势.

Long-Term Reliability and Control Methods of MEMS Micromirror in Automobile Environment

MEMS micromirror, a novel micro-optical-electro-mechanical system, can accomplish optical modulation at microscale and has been widely applied in the fields of photoelectric communication, medical imaging, civil projection, radar detection, etc. In recent years, MEMS LiDAR with micromirrors as core component is expected to become one of the more competitive autonomous sensors due to its advantages such as small size and low power consumption. However, given the specificity of in-vehicle applications, various reliability problems of MEMS micromirrors in complex multi-physical field coupled environments such as temperature and humidity, electromagnetic, vibration and shock have seriously restricted the engineering applications of MEMS LiDAR. Based on the reliability research of MEMS micromirrors, this paper reviews the complex failure forms and failure mechanisms such as delamination warpage, fracture, pull-in and short circuit burnout under extreme environments such as high frequency vibration, temperature & humidity cycling and electromagnetic coupling. We also summarize the common dynamics modelling theories and control methods of MEMS micromirrors and discuss the main challenges and development trends of MEMS LiDAR standardization.