基于双声表面波器件的引信加速度传感器

FuzeAcceleration Sensor Based on Double SAW Sevices

In view of the shortcomings of silicon micro acceleration sensor based on piezoresistive effect and capacitance principle, such as temperature drift, low resolution and poor anti-interference ability, a fuze acceleration sensor based on dual SAW devices is proposed. The sensor adopts a dual saw device structure, one is coated with a sensitive film for measurement, the other is an uncoat- ed reference channel for compensation of environmental temperature, pressure, humidity and other factors. The experimental results show that the maximum linear error is only 1.6%, the sensitivity is 54.3Hz/g, and the maximum hysteresis error is less than 1%. Compared with piezoresistive accelerometer and capacitive accelerometer, the linear error of the accelerometer is small, the sensitivi- ty is high, and it has strong anti-interference ability.