对超低浓度甲烷具有高气敏性的自组装型SnO2纳米棒气敏传感器 |
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引用本文: | 王冰.对超低浓度甲烷具有高气敏性的自组装型SnO2纳米棒气敏传感器[J].传感器世界,2008,14(6):6-9. |
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作者姓名: | 王冰 |
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作者单位: | 深圳大学电子科学与技术学院深圳市微纳光子信息技术重点实验室 |
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基金项目: | 深圳市微纳光子信息技术重点实验室开放基金 |
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摘 要: | 通过热蒸发SnO2和活性炭的混合粉末的自组装方式直接在Cr-Au梳状交叉电极上制备了一层SnO2纳米棒气敏层,从而研制出了SnO2纳米棒气敏传感器,经测试,发现此传感器对于浓度范围为2~5ppm的甲烷具有非常好的探测灵敏度,继而从气敏机制、自组装制备方式、SnO2纳米棒的比表面特性及SnO2纳米棒的尺度低于得拜长度等角度解释了此传感器对甲烷具有高气敏性的原因。
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关 键 词: | 气敏传感器 纳米材料 气敏特性 |
High-Sensitive Gas Sensor of Self-Assembled SnO2 Nanorods for CH4 with Rather Lower Concentration |
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Abstract: | CH4 sensors have been fabricated by self-assembled method that the SnO2 nanorods sensing layer are directly synthesized on the Cr-Au comb-shape interdigitating electrodes by thermal evaporation of SnO2 and active carbon mixture powders. The sensors have high gas sensitivity property to the rather lower CH4 concentration at the range of 2-5ppm. The gas sensing mechanism, the self-assembled fabrication, the relative higher surface-to-volume ratio of SnO2 nanorods, the rather smaller size of the SnO2 nanorods than the Debye length attribute to the highly gas sensing property of the SnO2 nanorods to CH4. |
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Keywords: | gas sensor nanomaterials gas sensitivity property |
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