Affiliation: | a Signals, Systems and Control Group, Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands b Mathematical System Theory Group, Department of Information Technology and Systems, Delft University of Technology, 2628 CD Delft, Netherlands c ASM Lithography, 5500 AH Veldhoven, Netherlands, formerly Mathematical System Theory Group, Department of Information Technology and Systems, Delft University of Technology, 2628 CD Delft, Netherlands d NMI-Institute for Metrology and Technology, Schoemakerstraat 97, 2628 VK Delft, Netherlands, formerly Delft Institute of Microelectronics and Submicrontechnology, Department of Applied Physics, Delft University of Technology, 2628 CD Delft, Netherlands |