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基于Petri网的半导体生产线建模
引用本文:黄丹,严隽薇,乔非,吴启迪.基于Petri网的半导体生产线建模[J].计算机工程,2005,31(5):69-71,133.
作者姓名:黄丹  严隽薇  乔非  吴启迪
作者单位:上海同济大学CIMS中心,上海,200092
基金项目:国家自然科学基金资助项目(60374005),国家“973”计划基金资助项目(2002CB312202)
摘    要:总结了Petri网在半导体生产线建模中的应用,着重针对半导体生产线大规模,可重入,可靠性,混合加工方式,不确定性等特殊复杂性,对多种扩展Petri网模型进行了分析和比较,并进一步探讨了基于Petri网模型和扩展Petri网模型的半导体生产线建模方式,指出了存在的问题,并探讨了可能的研究方向。

关 键 词:Petri网  半导体制造  模型  建模
文章编号:1000-3428(2005)05-0069-03

Petri Net Based Modeling Approach for Semiconductor Manufacturing System
HUANG Dan,YAN Juanwei,Qiao Fei,WU Qidi.Petri Net Based Modeling Approach for Semiconductor Manufacturing System[J].Computer Engineering,2005,31(5):69-71,133.
Authors:HUANG Dan  YAN Juanwei  Qiao Fei  WU Qidi
Abstract:The applications of Petri nets in semiconductor manufacturing system are reviewed. Aiming at some special complexities of semiconductor manufacturing system, such as large-scale,reentrance, reliability, mixed processing, uncertainty and so on, various extended Petri net models, as well as their modeling approaches are analyzed and compared. Then the problems are discussed and the further research of semiconductor manufacturing system based on Petri net is given.
Keywords:Petri net  Semiconductor manufacturing  Model  Modeling
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