| 基于扩展混合Petri网的晶圆制造系统建模 |
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| 引用本文： | 周炳海,潘青枝,陶丽华.基于扩展混合Petri网的晶圆制造系统建模[J].计算机工程,2007,33(10):237-239. |
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| 作者姓名： | 周炳海 潘青枝 陶丽华 |
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| 作者单位： | 1. 上海交通大学机械与动力工程学院,上海,200030
2. 柔性制造系统技术国家重点实验室,长春,130030 |
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| 基金项目： | 国家自然科学基金
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国防重点实验室基金 |
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| 摘 要： | 提出了一种扩展的面向对象混合Petri网（EOHPN）的建模方法：针对晶圆制造系统的复杂性，在EOHPN模型中融入了面向对象的抽象机制；为了减少系统建模的复杂性，引入混合Petri网并用面向对象建模技术作了扩展。在定义EOHPN模型的基础上，作了对象模型的拓展。用实例描述了基于EOHPN的晶圆制造系统的建模过程，验证了模型在处理系统建模时的有效性。
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| 关 键 词： | 晶圆制造 Petri网 面向对象模型 混合系统 建模 |
| 文章编号： | 1000-3428（2007）10-0237-03 |
| 修稿时间： | 2006-06-03 |
Modeling of Wafer Fabrication Systems Based on Extended Hybrid Petri Nets |
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| ZHOU Binghai,PAN Qingzhi,TAO Lihua.Modeling of Wafer Fabrication Systems Based on Extended Hybrid Petri Nets[J].Computer Engineering,2007,33(10):237-239. |
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| Authors: | ZHOU Binghai PAN Qingzhi TAO Lihua |
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| Affiliation: | 1. School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200030; 2. National Key Lab of FMS Technology, Changchun 130030 |
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| Abstract: | This paper proposes a model method of extended object-orient hybrid Petri net(EOHPN).To treat with the complexity of the wafer fabrication systems,object-oriented abstraction mechanisms such as encapsulation and classification are combined into EOHPN models.To reduce the complexity of the systems,a hybrid Petri net is introduced and extended with object-oriented modeling technology.Development of object models is suggested on the basis of the defined EOHPN.And a case is presented to illustrate how the proposed EOHPN is used to model the wafer fabrication systems.The resulting model validates that the EOHPN can deal with the modeling complexity of the wafer fabrication systems |
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| Keywords: | Wafer fabrication Petri nets Object-oriented model Hybrid system Modeling |
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