| 基于差动电容传感器的微动定位系统设计 |
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| 引用本文： | 范贤光,阙靖,王昕,许英杰,吴腾达,陈军.基于差动电容传感器的微动定位系统设计[J].测控技术,2017,36(12):106-109. |
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| 作者姓名： | 范贤光 阙靖 王昕 许英杰 吴腾达 陈军 |
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| 作者单位： | 厦门大学航空航天学院,福建厦门,361005 |
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| 基金项目： | 福建省高端装备制造协同创新中心资金资助项目；国家自然科学基金项目(21503171)；中央高校基本科研业务费项目(20720150091，20720150094) |
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| 摘 要： | 设计并加工了一种结构简单、小巧的微动定位系统,该系统精度较高、扫描范围大且成本低廉.采用簧片结构设计系统的机械结构,使用压电陶瓷作为执行器件,使用差动电容传感器作为位移反馈,实现闭环控制,从而有效克服了压电陶瓷执行器件的迟滞和蠕变效应.介绍了微动定位系统的机械组成和差动电容传感器信号检测电路的工作原理,并对系统进行了测试和标定实验.实验结果显示:该平台能够实现15 μm的扫描,精度约为15 nm,且动态性能良好.
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| 关 键 词： | 差动电容传感器 压电陶瓷 纳米定位 |
Design of Micro-Drive Positioning System Based on Differential Capacitance Sensor |
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| Abstract: | A simple and compact micro-drive positioning system is designed and manufactured,and the system is of high precision,wide scanning scope and low cost.The mechanical structure of the system is designed with spring structure,and driven by piezoelectric ceramics,and the differential capacitance sensor is taken as displacemen feedback to achieve closed loop control,which effectively compensates the hysteresis and creep of piezoelectric ceramic actuator.The structure of the system and the working principle of the detection circuit are introduced,and the test and calibration for the system are carried out.The experiment results indicate that the micro-drive positioning system can achieve a scanning scope of 15 μm with a resolution of about 15 nm,and the dynamic performance is fine. |
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| Keywords: | differential capacitance sensor piezoelectric ceramics nanometer positioning |
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