| 边缘检测法在晶圆缺陷检测中的应用 |
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| 引用本文： | 方宝英,周建宁,魏爱英.边缘检测法在晶圆缺陷检测中的应用[J].计算机与数字工程,2010,38(6):132-134. |
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| 作者姓名： | 方宝英 周建宁 魏爱英 |
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| 作者单位： | 1. 上海理工大学光电信息与计算机工程学院,上海,200093
2. 公安部交通管理科学研究所,无锡,214151 |
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| 摘 要： | 边缘检测技术是一种重要的图像预处理技术,是图像拼接前必不可少的环节。文章提出了一种新方法-水平垂直边缘检测法,其目的是为Hough直线检测提供准备,最终是为了确定图像拼接的基准线,该方法对医学显微图像的拼接,印刷行业、电路板设计等工序的缺陷检测具有一定的现实意义。
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| 关 键 词： | 水平垂直边缘检测法 图像拼接 图像对准 Hough变换 |
Application of Edge-detect Technology in the Wafer Detecting System |
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| Fang Baoying,Zhou Jianning,Wei Aiying.Application of Edge-detect Technology in the Wafer Detecting System[J].Computer and Digital Engineering,2010,38(6):132-134. |
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| Authors: | Fang Baoying Zhou Jianning Wei Aiying |
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| Affiliation: | Fang Baoying) Zhou Jianning) Wei Aiying)(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology1),Shanghai 200093)(Traffic Management Research Institute of Public Security Ministry2),Wuxi 214151) |
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| Abstract: | Edge-detect is an important technology of digital image pre-processing and is also absolutely necessarily in image mosaic.This paper introduce a new method named horizontal and vertical detection prepared for detecting the straight line in order to determine the baseline for image registration.All algorithms in image mosaic technology applied in the wafer defect inspection system can be applied into practice such as microscopic image mosaicing and circuit design industry. |
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| Keywords: | horizontal and vertical detection image mosaic image registration Hough transform |
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